@fjFrédéric Jacobs from its origins to then arriving at a system with a custom designed vacuum chamber, custom designed wafer stage, custom developed and self produced MEMS chip in a Russian fab (why that was built in Russia is beyond me), custom developer FPGAs to stream the pattern for printing on the chip because back then computing chips were not fast enough. Custom developed electron source with custom developed electron optics all running on of course super intricate custom software.
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